Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Fiori, Alexandre, Jomard, François, Teraji, Tokuyuki, Chicot, Gauthier, Bustarret, Etienne |
| Maintainer | CCSD |
| Last Updated | May 8, 2026, 02:26 (UTC) |
| Created | May 8, 2026, 02:26 (UTC) |
| Identifier | hal-00909407 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Semi-conducteurs à large bande interdite (NEEL - SC2G) ; Institut Néel (NEEL) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Fiori, Alexandre |
| date | 2014-04-08T00:00:00 |
| harvest_object_id | 0c67c24b-29cf-43ab-9dca-63b220e6dc9f |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2013.10.076 |
| set_spec | type:ART |