Epitaxial growth of AlN thin films at low temperature by magnetron sputtering technique
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | European Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium J - Semiconductor nanostructures towards electronic and optoelectronic device applications IV |
| Author | Camus, Julien, Simon, Quentin, Aït Aïssa, Keltouma, Bensalem, Salma, Le Brizoual, Laurent, Tessier, Gilles, Scudeller, Yves, Djouadi, Mohamed Abdou, Cordier, Yvon, Frayssinet, Éric, de Jaeger, Jean-Claude, Chmielowska, Magdalena, Nemoz, Maud, Vennéguès, Philippe, Chenot, Sébastien, Defrance, Nicolas, Lesecq, Marie, Altuntas, Philippe, Cutivet, Adrien, Agboton, Alain |
| Maintainer | CCSD |
| Last Updated | May 9, 2026, 04:04 (UTC) |
| Created | May 9, 2026, 04:04 (UTC) |
| Identifier | hal-00878878 |
| Language | en |
| contributor | Institut des Matériaux Jean Rouxel (IMN) ; Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST) ; Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN) ; Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Strasbourg, France |
| creator | Camus, Julien |
| date | 2013-05-09T00:00:00 |
| harvest_object_id | 38b8703a-f4c2-4e46-95a5-42bc4064aa7c |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-01-26T00:00:00 |
| set_spec | type:COMM |