Closed-loop Control of a Novel 2-DOF MEMS Nanopositioner with Electrothermal Actuation.
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | The 6th IFAC Symposium on Mechatronic Systems (Mechatronics'2013). |
| Author | Fowler, Anthony, Rakotondrabe, Micky, Reza Moheimani, S.O. |
| Maintainer | CCSD |
| Last Updated | May 9, 2026, 11:43 (UTC) |
| Created | May 9, 2026, 11:43 (UTC) |
| Identifier | hal-00869932 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | University of Newcastle [Callaghan, Australia] (UoN) |
| creator | Fowler, Anthony |
| date | 2013-01-01T00:00:00 |
| harvest_object_id | 9ad05d9c-5027-4755-bfe5-07af1ba7ad68 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-05-13T00:00:00 |
| set_spec | type:COMM |