Study of aluminium tri-isopropoxide (ATI) chemistry in an rf plasma by FTIR spectroscopy

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Data and Resources

Additional Info

Field Value
Source 10th Frontiers in Low Temperature Plasma Diagnostics
Author Hübner, Marko, Fröhlich, Maik, Tawidian, Hagop, Mikikian, Maxime, Kersten, Holger, Röpcke, Jürgen
Maintainer CCSD
Last Updated May 10, 2026, 19:27 (UTC)
Created May 10, 2026, 19:27 (UTC)
Identifier hal-00831959
Language en
contributor Leibniz Institute for Plasma Science and Technology (INP) ; Leibniz Association = Leibniz Gemeinschaft = Wissenschaftsgemeinschaft Gottfried Wilhelm Leibniz (LG / WGL)
coverage Kerkrade, Netherlands
creator Hübner, Marko
date 2013-04-28T00:00:00
harvest_object_id 7bad63d4-11f3-4d2c-bfb0-c3aca96216a4
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-12-14T00:00:00
set_spec type:COMM