Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Kokkoris, G., Brault, Pascal, Thomann, Anne Lise, Caillard, Amaël, Samelor, Diane, Boudouvis, Andreas G., Vahlas, Constantin |
| Maintainer | CCSD |
| Last Updated | May 11, 2026, 00:13 (UTC) |
| Created | May 11, 2026, 00:13 (UTC) |
| Identifier | hal-00826502 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Sector of Microelectronics ; National Center for Scientific Research "Demokritos" (NCSR) |
| creator | Kokkoris, G. |
| date | 2013-05-11T00:00:00 |
| harvest_object_id | 431722f8-af61-4c50-9c6d-1ef142c676a0 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-02-07T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2013.03.098 |
| set_spec | type:ART |