Porosity evaluation of PoSi wafer using a nondestructive ultrasonic technic

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Source Acoustics 2012 Nantes
Author Bustillo, Julien, Fortineau, Jérôme, Capelle, Marie, Vander Meulen, François, Haumesser, Lionel, Gautier, Gael, Lethiecq, Marc
Maintainer CCSD
Last Updated May 11, 2026, 14:25 (UTC)
Created May 11, 2026, 14:25 (UTC)
Identifier hal-00810963
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor Imaging, Brain & Neuropsychiatry (iBraiN) ; Université de Tours (UT)-Institut National de la Santé et de la Recherche Médicale (INSERM)
coverage Nantes, France
creator Bustillo, Julien
date 2012-04-23T00:00:00
harvest_object_id 72ae8119-fec5-46d2-9324-35d898cdac93
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-09-17T00:00:00
set_spec type:COMM