Reversing tone of patterns on integrated circuit and nanoscale fabrication
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | https://hal.science/hal-00808853 |
| Author | Clevenger, L.A., Darnon, Maxime, D. Lisi, A., V. Nitta, S. |
| Maintainer | CCSD |
| Last Updated | May 11, 2026, 15:54 (UTC) |
| Created | May 11, 2026, 15:54 (UTC) |
| Identifier | Patent N°: US 8,183,694 |
| Language | en |
| contributor | Laboratoire des technologies de la microélectronique (LTM) ; Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Clevenger, L.A. |
| date | 2012-05-22T00:00:00 |
| harvest_object_id | 59d3a731-0aff-4ee1-824e-6e33951a1ad5 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:PATENT |