Atomic Layer Deposition of TiO2 ultrathin films on 3D substrates for energy applications

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Source MRS 2012
Author Soum-Glaude, Audrey, Tian, L., Blanquet, E., Brizé, V., Cagnon, L., Giusti, G., Salhi, R., Daniele, S., Ternon, C., Bellet, D.
Maintainer CCSD
Last Updated May 11, 2026, 17:20 (UTC)
Created May 11, 2026, 17:20 (UTC)
Identifier hal-00807357
Language en
contributor Science et Ingénierie des Matériaux et Procédés (SIMaP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS)
coverage San Francisco CA, France
creator Soum-Glaude, Audrey
date 2012-05-11T00:00:00
harvest_object_id 742143b0-71b8-4b2f-abcc-70b4e613cbfe
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2025-09-27T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1557/opl.2012.913
set_spec type:COMM