An experimental and computational analysis of a MOCVD process for the growth of Al films using DMEAA

International audience

Data and Resources

Additional Info

Field Value
Source ISSN: 0257-8972
Author Xenidou, Theodora C., Boudouvis, Andreas. G., Markatos, Nicholas. C., Samélor, Diane, Senocq, François, Prud'Homme, Nathalie, Vahlas, Constantin
Maintainer CCSD
Last Updated May 11, 2026, 21:05 (UTC)
Created May 11, 2026, 21:05 (UTC)
Identifier hal-00806220
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor National Technical University of Athens (NTUA)
creator Xenidou, Theodora C.
date 2007-09-25T00:00:00
harvest_object_id bc010ab6-56b2-4bd5-8fdb-d076b5e831c0
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-01-30T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1016/j.surfcoat.2007.04.080
set_spec type:ART