This paper presents an acoustofluidics platform for elastic characterization of biological samples using ultra high frequency (∼1 GHz) ultrasonic bulk acoustic waves (BAW). The propagation of bulk acoustic waves in a plane parallel to the surface of a silicon wafer was controlled using 45° acoustic mirrors, thus leading to the development of real time biosensing applications in a microchannel fabricated using ICP technology. To validate the design and technology of the silicon and PDMS-based platform, the propagation of bulk acoustic waves through the microfluidic channel was studied. This lab-on-a-chip platform was used to characterize different concentrations of chemical solutions in the microfluidic channel and detect latex particles passing through the channel.
