CMOS Post-Processing of Ciliary Motion Actuators of UV-patterned Polyimides
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | IEEJ Technical Meeting on Sensors and Micromachines |
| Author | Malapert, Julien, Morishita, Satoshi, Ataka, Manabu, Fujita, Hiroyuki, Mita, Yoshio |
| Maintainer | CCSD |
| Last Updated | May 15, 2026, 04:44 (UTC) |
| Created | May 15, 2026, 04:44 (UTC) |
| Identifier | hal-00777827 |
| Language | en |
| contributor | intelligente Semiconductor Microsystem Laboratory (iSML) ; The University of Tokyo (UTokyo) |
| coverage | Kyoto, Japan |
| creator | Malapert, Julien |
| date | 2012-06-11T00:00:00 |
| harvest_object_id | 8664ff90-aea3-4159-a92c-242fe0958145 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-02-02T00:00:00 |
| set_spec | type:COMM |