Optimization of DC reactive magnetron sputtering deposition process for efficient YSZ electrolyte thin film SOFC

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Source ISSN: 1615-6846
Author Hidalgo, Hervé, Thomann, Anne-Lise, Lecas, Thomas, Vuillet, Julien, Wittman-Teneze, K., Damiani, David, Millon, Eric, Brault, Pascal
Maintainer CCSD
Last Updated June 3, 2026, 21:37 (UTC)
Created June 3, 2026, 21:37 (UTC)
Identifier hal-00757718
Language en
Rights https://about.hal.science/hal-authorisation-v1/
contributor Groupe de recherches sur l'énergétique des milieux ionisés (GREMI) ; Université d'Orléans (UO)-Centre National de la Recherche Scientifique (CNRS)
creator Hidalgo, Hervé
date 2013-06-03T00:00:00
harvest_object_id 96fe7f7d-2987-401e-8406-1947158493d9
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2024-09-03T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1002/fuce.201200125
set_spec type:ART