Overlay measurements by Mueller polarimetry in back focal plane
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 1932-5150 |
| Author | Fallet, Clément, Novikova, Tatiana, Foldyna, Martin, Manhas, Sandeep, Haj Ibrahim, Bicher, de Martino, Antonello, Vannuffel, Cyril, Constancias, Christophe |
| Maintainer | CCSD |
| Last Updated | June 4, 2026, 01:45 (UTC) |
| Created | June 4, 2026, 01:45 (UTC) |
| Identifier | hal-00757394 |
| Language | en |
| contributor | Laboratoire de Physique des Interfaces et des Couches Minces (LPICM) ; École polytechnique (X) ; Institut Polytechnique de Paris (IP Paris)-Institut Polytechnique de Paris (IP Paris)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Fallet, Clément |
| date | 2011-09-04T00:00:00 |
| harvest_object_id | b3325456-5706-47a0-b087-00513e219e65 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-03-21T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1117/1.3626852 |
| set_spec | type:ART |