Effects of Roughness on Scatterometry Signatures
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS 2011 |
| Author | Foldyna, M., Germer, T. A., Bergner, B. C. |
| Maintainer | CCSD |
| Last Updated | June 4, 2026, 01:17 (UTC) |
| Created | June 4, 2026, 01:17 (UTC) |
| Identifier | hal-00757379 |
| Language | en |
| contributor | Laboratoire de Physique des Interfaces et des Couches Minces (LPICM) ; École polytechnique (X) ; Institut Polytechnique de Paris (IP Paris)-Institut Polytechnique de Paris (IP Paris)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Grenoble, France |
| creator | Foldyna, M. |
| date | 2011-05-23T00:00:00 |
| harvest_object_id | 285b486b-8d6f-446c-8518-26c96faee5af |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-11-21T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1063/1.3657865 |
| set_spec | type:COMM |