Generalized ellipsometry of artificially designed line width roughness
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Foldyna, Martin, Germer, Thomas A., Bergner, Brent C., Dixson, Ronald G. |
| Maintainer | CCSD |
| Last Updated | June 4, 2026, 01:20 (UTC) |
| Created | June 4, 2026, 01:20 (UTC) |
| Identifier | hal-00757371 |
| Language | en |
| contributor | Laboratoire de Physique des Interfaces et des Couches Minces (LPICM) ; École polytechnique (X) ; Institut Polytechnique de Paris (IP Paris)-Institut Polytechnique de Paris (IP Paris)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Foldyna, Martin |
| date | 2011-02-04T00:00:00 |
| harvest_object_id | fe609f72-5d71-4469-a6d1-16dd6e5b3e6b |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-11-21T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/J.TSF.2010.11.085 |
| set_spec | type:ART |