Data collection of chemicals used in microelectronic manufacturing processes for environmental studies
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | 19th CIRP Conference on Life Cycle Engineering |
| Author | Baudry, Ingwild, Lelah, Alan, Brissaud, Daniel |
| Maintainer | CCSD |
| Last Updated | May 15, 2026, 19:21 (UTC) |
| Created | May 15, 2026, 19:21 (UTC) |
| Identifier | hal-00707368 |
| Language | en |
| contributor | Conception Produit Process (G-SCOP_CPP) ; Laboratoire des sciences pour la conception, l'optimisation et la production (G-SCOP) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Berkeley, United States |
| creator | Baudry, Ingwild |
| date | 2012-05-23T00:00:00 |
| harvest_object_id | 4ac99c9b-d6e5-4c02-9909-602d0b579316 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-09-27T00:00:00 |
| set_spec | type:COMM |