Spatial characterization of Ar-Ti plasma in a magnetron sputtering system using emission and absorption spectroscopy
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0963-0252 |
| Author | Britun, Nikolay, Gaillard, Mireille, Schwaederlé, Laurent, Kim, Yong Mo, Han, J.-G. |
| Maintainer | CCSD |
| Last Updated | May 15, 2026, 22:54 (UTC) |
| Created | May 15, 2026, 22:54 (UTC) |
| Identifier | hal-00705268 |
| Language | en |
| contributor | CAPST ; Center for Advanced Plasma Surface Technology (CAPST) ; Sung Kyun Kwan University-Sung Kyun Kwan University |
| creator | Britun, Nikolay |
| date | 2006-05-15T00:00:00 |
| harvest_object_id | d63fb03e-0e59-42b7-a79c-36ee819fd8da |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2023-10-31T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1088/0963-0252/15/4/024 |
| set_spec | type:ART |