Device for quantitative detection of copper in silicon by transient ionic drift and method using same
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | https://hal.science/hal-00685598 |
| Author | Heiser, T. |
| Maintainer | CCSD |
| Last Updated | May 22, 2026, 14:08 (UTC) |
| Created | May 22, 2026, 14:08 (UTC) |
| Identifier | Patent N°: N° DE1114452 |
| Language | en |
| contributor | Institut d'Electronique du Solide et des Systèmes (InESS) ; Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Heiser, T. |
| date | 2002-04-04T00:00:00 |
| harvest_object_id | 4eb7d8af-273e-4b19-a64d-a0a92776c217 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-02-25T00:00:00 |
| set_spec | type:PATENT |
