Device for quantitative detection of copper in silicon by transient ionic drift and method using same

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Source https://hal.science/hal-00685598
Author Heiser, T.
Maintainer CCSD
Last Updated May 22, 2026, 14:08 (UTC)
Created May 22, 2026, 14:08 (UTC)
Identifier Patent N°: N° DE1114452
Language en
contributor Institut d'Electronique du Solide et des Systèmes (InESS) ; Université de Strasbourg (UNISTRA)-Centre National de la Recherche Scientifique (CNRS)
creator Heiser, T.
date 2002-04-04T00:00:00
harvest_object_id 4eb7d8af-273e-4b19-a64d-a0a92776c217
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-02-25T00:00:00
set_spec type:PATENT