Production of multilayer microcomponents by the sacrificial thick layer method
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | https://hal.science/hal-00670351 |
| Author | Lucat, Claude, Ginet, Patrick, Ménil, Francis, Debéda, Hélène |
| Maintainer | CCSD |
| Last Updated | May 28, 2026, 15:49 (UTC) |
| Created | May 28, 2026, 15:49 (UTC) |
| Identifier | Patent N°: EP n°07712639.9 |
| Language | en |
| contributor | Laboratoire de l'intégration, du matériau au système (IMS) ; Université de Bordeaux (UB)-Institut Polytechnique de Bordeaux-Centre National de la Recherche Scientifique (CNRS) |
| creator | Lucat, Claude |
| date | 2007-01-05T00:00:00 |
| harvest_object_id | 41c1e27a-b423-4f78-bef6-590eaf9f46fe |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-03-17T00:00:00 |
| set_spec | type:PATENT |