Micro-optic measurement techniques and instrumentation in the European Network of Excellence for Micro-Optics NEMO
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proc. of SPIE, Optical Metrology 2005, Micro–and Nano–Metrology, 16–17 June 2005, tome 5858, pp. 1–8 |
| Author | Kujawinska, M., Gorecki, C., Ottevaere, H., Szcpepanski, P., Thienpont, H. |
| Maintainer | CCSD |
| Last Updated | May 5, 2026, 19:59 (UTC) |
| Created | May 5, 2026, 19:59 (UTC) |
| Identifier | hal-00096721 |
| Language | en |
| contributor | Institute of Atomic Physics ; Université de Roumanie |
| coverage | Munich, Germany |
| creator | Kujawinska, M. |
| date | 2005-05-05T00:00:00 |
| harvest_object_id | f09662a1-4bab-40c6-b0d0-1a5ae67d940a |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-02-18T00:00:00 |
| set_spec | type:COMM |