Dynamic measurements of actuators driven by AlN layers
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proc. of SPIE, Optics and Optoelectronics, Lasers and Applications, 30 august–2 september 2005, tome 5958 |
| Author | Kacperski, J., Kujawinska, M., Camacho Leon, S., Nieradko, L., Jozwik, M., Gorecki, C. |
| Maintainer | CCSD |
| Last Updated | May 6, 2026, 05:36 (UTC) |
| Created | May 6, 2026, 05:36 (UTC) |
| Identifier | hal-00095245 |
| Language | en |
| contributor | Institute of Atomic Physics ; Université de Roumanie |
| creator | Kacperski, J. |
| date | 2005-05-06T00:00:00 |
| harvest_object_id | 171e3314-5c82-4cd8-8ec6-29600c296fe8 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2025-02-18T00:00:00 |
| set_spec | type:COMM |