Design and fabrication of a structured catalytic reactor at micrometer scale: Example of methylcyclohexane dehydrogenation

A silicon micro-structured reactor has been designed for gas–solid heterogeneous catalysis, in particular for the dehydrogenation of methylcyclohexane. Two types of catalyst deposition on silicon have been evaluated: the first consists of a washcoat deposition of a γ-alumina layer followed by Pt impregnation, the second is a cathodic Pt film sputtering. The Pt/Al2O3 catalyst reveals a higher activity for this reaction and was selected for further investigation. Since the micro-structured reactor is composed of pillars of typical dimension 5 × 100 μm, a special washcoat method has been developed leading to the controlled deposition of a homogeneous γ-alumina layer of thickness <1 μm. Because the dehydrogenation reaction is endothermic (204 kJ mol−1) and conducted at ca. 380 °C, heaters have been integrated using screen-printing methods. FEMLAB simulations have helped to integrate the hot reaction zone and a low temperature section for connectors (<200 °C) in a 10 × 30 mm chip.

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Source ISSN: 0920-5861
Author Roumanie, M., Meille, V., Pijolat, C., Tournier, G., de Bellefon, C., Pouteau, P., Delattre, C.
Maintainer CCSD
Last Updated May 7, 2026, 20:43 (UTC)
Created May 7, 2026, 20:43 (UTC)
Identifier hal-00091709
Language en
contributor Département Microsystèmes, Instrumentation et Capteurs Chimiques (MICC-ENSMSE) ; École des Mines de Saint-Étienne (Mines Saint-Étienne MSE) ; Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-SPIN
creator Roumanie, M.
date 2005-05-07T00:00:00
harvest_object_id 10f5b16e-fa75-44af-8e6f-337396a18a6e
harvest_source_id 3374d638-d20b-4672-ba96-a23232d55657
harvest_source_title test moissonnage SELUNE
metadata_modified 2026-01-19T00:00:00
relation info:eu-repo/semantics/altIdentifier/doi/10.1016/j.cattod.2005.09.013
set_spec type:ART