Application of aluminium oxide and Ta-C thin films deposited at room temperature by PLD in RF-MEMS fabrication
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | ISSN: 0040-6090 |
| Author | Orlianges, Jean-Christophe, Pothier, Arnaud, Mercier, D., Blondy, Pierre, Champeaux, Corinne, Catherinot, Alain, de Barros, M.I., Pavant, S. |
| Maintainer | CCSD |
| Last Updated | May 9, 2026, 03:15 (UTC) |
| Created | May 9, 2026, 03:15 (UTC) |
| Identifier | hal-00088050 |
| Language | en |
| contributor | MINACOM ; XLIM (XLIM) ; Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Centre National de la Recherche Scientifique (CNRS) |
| creator | Orlianges, Jean-Christophe |
| date | 2005-05-09T00:00:00 |
| harvest_object_id | 2d28067c-63b0-45f8-b831-710de7c5b038 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2024-09-30T00:00:00 |
| relation | info:eu-repo/semantics/altIdentifier/doi/10.1016/j.tsf.2004.11.143 |
| set_spec | type:ART |