CMP: the access to advanced low cost manufacturing
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proceedings 2001 International Conference on Microelectronic Systems Education. MSE'01. Designing Microsystems in the New Millennium, 17-18 June6 |
| Author | Torki, K., Courtois, B. |
| Maintainer | CCSD |
| Last Updated | May 11, 2026, 10:24 (UTC) |
| Created | May 11, 2026, 10:24 (UTC) |
| Identifier | hal-00081511 |
| Language | en |
| contributor | Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA) ; Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS) |
| coverage | Las Vegas, United States |
| creator | Torki, K. |
| date | 2001-05-11T00:00:00 |
| harvest_object_id | 46afd368-53d8-4d0f-b6a5-c7f04246a50d |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-03-26T00:00:00 |
| set_spec | type:COMM |