INVESTIGATION OF BORON AND NITROGEN ION BEAM IMPLANTATION IN GOLD THIN FILMS FOR OHMIC MEMS SWITCH CONTACT IMPROVEMENT
Data and Resources
Additional Info
| Field | Value |
|---|---|
| Source | Proceedings of Tansducers 2013 and Eurosensors XXVII |
| Author | Arrazat, Brice, Inal, Karim, Gergaud, Patrice |
| Maintainer | CCSD |
| Last Updated | May 10, 2026, 12:27 (UTC) |
| Created | May 10, 2026, 12:27 (UTC) |
| Identifier | emse-00840099 |
| Language | en |
| Rights | https://about.hal.science/hal-authorisation-v1/ |
| contributor | Département Packaging et Supports Souples (PS2-ENSMSE) ; École des Mines de Saint-Étienne (Mines Saint-Étienne MSE) ; Institut Mines-Télécom [Paris] (IMT)-Institut Mines-Télécom [Paris] (IMT)-CMP-GC |
| coverage | Barcelona, Spain |
| creator | Arrazat, Brice |
| date | 2013-06-17T00:00:00 |
| harvest_object_id | 54dbc6c1-d86d-4400-b19f-70ffed521474 |
| harvest_source_id | 3374d638-d20b-4672-ba96-a23232d55657 |
| harvest_source_title | test moissonnage SELUNE |
| metadata_modified | 2026-04-28T00:00:00 |
| set_spec | type:COMM |