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In situ non-contact measurements of surface roughness
International audience -
Typology, chronology and distribution of the large Alpine axeheads in Western...
International audience -
Modelling of defect correction on aspherical lithography optics : a discrete ...
In aspherical photolithography optics manufacturing, the smoothing step iscritical. So far, it is the only process that can correct high spatial frequency defects,... -
Defect analysis and excitons diffusion in undoped homoepitaxial diamond films...
International audience -
Design of experiments to optimize automatic polishing on 5-axis machine tool
International audience
