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Investigations of a microwave plasma source operating with air, N2, CO2 and a...
International audience -
Study of the deposition and structural as well as electrical proper...
This thesis presents a study of the deposition and structural as well as electrical properties of thin films of thermoelectric materials Mg2Sn-Mg2Si. Polycrystalline... -
Plasma material surface investigation in a nitriding process of thin molybden...
International audience -
Design, study and optimisation of new plasma sources involving electron cyclo...
HEF group, a French leading company in plasma enhanced surface engineering, has been using electron cyclotron resonance based multi-dipolar microwave plasma sources... -
Thermoelectric material Mg2Si-Mg2Sn elaborated in thin films by plasma assist...
This thesis presents a study of the deposition and structural as well as electrical properties of thin films of thermoelectric materials Mg2Sn-Mg2Si. Polycrystalline...
