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MEMS ACTUATORS AND RESONATORS : APPLICATIONS TO NANO-CHARACTERIZATION
My research activities have covered since 1996 the fields of nanosciences, semi-conductor physics, micro and nanotechnologies and MEMS/NEMS... -
Elaboration of a capacitive transducer for vibration-to-electricity power con...
A relevant solution to power isolated sensors is to harvest the energy available in their immediate environment. Among the possible sources of energy, our choice was... -
Investigation of indium nitride for micro-nanotechnology
International audience -
Design, fabrication and characterization of SU8-based microactuators for mani...
The development of microsystems technologies has enabled the emergence of devices able to manipulate and make measurements on microobjects using different techniques.... -
Introduction of mechanical concepts in Micro and Nano Systems
Le document n'intègre pas la partie "perspectives, projet de recherche" de la version imprimée du rapport pour des raisons de confidentialité. -
Study of ultra thin membranes for acoustic transducers. Experimental approach.
This thesis concerns a context of miniaturization of micromachined ultrasonic transducers (cMUTs). This type of device has been used for decades in the field of...
