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Design, development and characterization of planar inductors with magnetic la...
This thesis concerns the miniaturization and integration of magnetic components such as inductors used in DC-DC converters and high frequency circuits. This thesis... -
Development of spatially resolved metrology processes of nano-topography over...
Chemical Mechanical Polishing (CMP), because of narrower specifications, as surface planarization at ± 5 nm, is becoming a critical process for the development of the...
