Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing
type: Distribution
access URL: https://ujm.hal.science/ujm-00681960
format: HTML
issued: 2026-05-23T16:38:57.505752
modified: 2026-05-23T16:38:57.410711

test_moissonnage_selune
type: Agent

Submicrometric gratings fabrication from photosensitive organo-silica-hafnia thin films elaborated by sol-gel processing
type: Dataset
contact point: Organization
  fn: CCSD
keyword: infoeu-reposemanticsarticle
keyword: chimmatechemical-sciencesmaterial-chemistry
keyword: silica
keyword: diffraction-gratings
keyword: journal-articles
keyword: x-ray-photoelectron-spectroscopy
keyword: hafnia
keyword: thin-films
keyword: spimatengineering-sciences-physicsmaterials
keyword: sol-gel-deposition
keyword: photosensitivity
landing page: 0040-6090
description: International audience
issued: 2026-05-23T16:38:57.435001
language: en
modified: 2026-05-23T16:38:57.435007