CONTRIBUTION A L'EVALUATION DE LA TECHNIQUE DE GENERATION D'HARMONIQUE PAR FAISCEAU LASER POUR LA MESURE DES CHAMPS ELECTRIQUES DANS LES CIRCUITS INTEGRES (EFISHG)
type: Dataset
description: This work contributes to the evaluation of the technique of second harmonic generation induced by a quasi-static electric field, or EFISHG, applied to the field of microelectronics. A description of the principle of the technique EFISHG based on nonlinear optics, explains the physical origin of this method. A state of the art has identified two areas of applications related to microelectronics failure analysis, using the measurement of the internal electric fields in integrated circuits, and reliability by the studies of both charge trapping at the interface Si/SiO2 and degradation called Negative Bias Temperature Instability or NBTI. This manuscript presents the different steps that led to the development of a bench test for evaluating the applicability of the EFISHG technique. The experimental results obtained with it prove the potential of the EFISHG technique to characterize and accelerate the aging NBTI.
issued: 2026-05-05T10:04:59.497989
language: fr
modified: 2026-05-05T10:04:59.497994
contact point: Organization
  fn: CCSD
keyword: -negative-bias-temperature-instability--nbti
keyword: generation-de-seconde-harmonique-induite-par-laser-efishg
keyword: infoeu-reposemanticsdoctoralthesis
keyword: mesure-de-champs-electriques-dans-les-circuits-integres
keyword: negative-bias-temperature-instability--nbti
keyword: optique-non-lineaire
keyword: piegeage-de-charge-a-linterface-sisio2
keyword: spitronengineering-sciences-physicselectronics
keyword: theses
landing page: https://theses.hal.science/tel-00997396

CONTRIBUTION A L'EVALUATION DE LA TECHNIQUE DE GENERATION D'HARMONIQUE PAR FAISCEAU LASER POUR LA MESURE DES CHAMPS ELECTRIQUES DANS LES CIRCUITS INTEGRES (EFISHG)
type: Distribution
format: HTML
issued: 2026-05-05T10:04:59.505530
modified: 2026-05-05T10:04:59.485640
access URL: https://theses.hal.science/tel-00997396

test_moissonnage_selune
type: Agent