Development of metallic dielectric stacks for optical applications : design, production and characterization
type: Dataset
description: This thesis deals the study of deposition conditions 'effect on the microstructure and optical properties of monolayers in order to achieve marketable optical filters, with particular specifications. All filters and monolayers were deposited by ion-assisted electron-beam evaporation technique. One of the two projects was to test the feasibility of infrared optical filters in the range [2-15] µm with non-toxic materials. The study of monolayers of three fluorides showed different behaviors depending on the deposition conditions especially as a function of the substrate temperature that affects their microstructure. For different filters realized, the association of BaF₂ with germanium, settings of deposition optimized, shows results close to the theory and these filters are marketable. The second project was to develop a deposition chamber in order to realize complex filters built with one hundred layers of variable thickness (15 to 300 nm) associating monolayers of TiO₂ with monolayers of SiO₂. The study of the influence of deposition parameters (pressure, ionic assistance, preheating of material) through different characterizations (SEM, AFM, ellipsometry) allowed the optimization of deposition's parameter settings more effective, and adapted according to the specifications of the optical filters to realize. Then, an ellipsometric advanced study of the refractive index of TiO₂ monolayers depending on their thickness led to a significant change in results for the realization of complex filter.
identifier: NNT: 2013REN1S160
issued: 2026-05-05T10:59:42.360227
language: fr
modified: 2026-05-05T10:59:42.360231
contact point: Organization
  fn: CCSD
keyword: assistance-ionique
keyword: baf
keyword: caf
keyword: chimothechemical-sciencesother
keyword: couches-minces
keyword: ellipsometrie-spectroscopique
keyword: evaporation
keyword: filtre-optique
keyword: germanium
keyword: infoeu-reposemanticsdoctoralthesis
keyword: ion-assisted-electron-beam-evaporation
keyword: optical-filter
keyword: sio
keyword: spectroscopic-ellipsometry
keyword: theses
keyword: thin-films
keyword: tio
keyword: yf
landing page: https://theses.hal.science/tel-00992394

Development of metallic dielectric stacks for optical applications : design, production and characterization
type: Distribution
format: HTML
issued: 2026-05-05T10:59:42.369528
modified: 2026-05-05T10:59:42.340900
access URL: https://theses.hal.science/tel-00992394

test_moissonnage_selune
type: Agent