Laser doping and laser annealing for crystalline silicon solar cells processing
type: Dataset
description: This study aims at investigating laser doping and laser annealing for crystalline silicon solar cells processing. Laser-processed emitters are firstly realized using three lasers and different dopants sources. The lasers are a nanosecond green laser, an excimer laser and a high-frequency ultraviolet laser. As dopants sources we used either phosphosilicate glass, phosphorus and boron-doped silicon nitrides, or phosphorus and boron ion implantation. Efficient phosphorus and boron doping are obtained using any of these laser/sources couple. In particular, low sheet resistances and low emitter saturation current densities are obtained. These laser processes are then applied to selective emitter and boron back-surface-field solar cells. Laser-doped selective emitter solar cells (using phosphosilicate glass as a dopants source) reach 18.3 % efficiency. This represents an overall gain of 0.6 %abs when compared to standard homogeneous emitter. On the other hand, laserannealed boron back-surface-field solar cells (using implanted boron as a dopants source) feature an overall gain of 0.3 %abs when compared to standard aluminium back-surface-field solar cells, thus yielding an efficiency of 16.7 %.
landing page: https://theses.hal.science/tel-00969033
identifier: NNT: 2012STRAD022
keyword: boron-bsf
keyword: bsf-bore
keyword: dopage-laser
keyword: emetteur-selectif
keyword: infoeu-reposemanticsdoctoralthesis
keyword: laser-annealing
keyword: laser-doping
keyword: photovoltaic
keyword: photovoltaique
keyword: recuit-laser
keyword: selective-emitter
keyword: silicium
keyword: silicon
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: theses
issued: 2026-05-05T19:05:07.548376
modified: 2026-05-05T19:05:07.548380
language: fr
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Laser doping and laser annealing for crystalline silicon solar cells processing
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00969033
issued: 2026-05-05T19:05:07.550097
modified: 2026-05-05T19:05:07.523012