Design, fabrication and control of a planar , non redondant, MEMS digital microrobot
type: Dataset
description: With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics,optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly ofsmaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over theworld, making use of high resolution actuators and numerous sensors adapted to the microworld.This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling,fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot— inspired from digital electronics — which makes use of binary actuators for the generation of discretedisplacements with high accuracy without any sensors (open-loop control). These highly repeatable and robustbinary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithicallyconbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable andmechanically robust. They are evenly spread inside a 10.5 μm length square.After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-roomof FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolutionwith 90 nm repeatability
identifier: NNT: 2013BESA2003
issued: 2026-05-07T22:37:33.070439
language: fr
modified: 2026-05-07T22:37:33.070446
contact point: Organization
  fn: CCSD
keyword: bistable-structure
keyword: boucle-ouverte
keyword: digital
keyword: flexible-structure
keyword: infoeu-reposemanticsdoctoralthesis
keyword: microfabrication
keyword: microrobot
keyword: numerique
keyword: open-loop-control
keyword: spiotherengineering-sciences-physicsother
keyword: structure-bistable
keyword: structure-flexible
keyword: theses
landing page: https://theses.hal.science/tel-00914595

Design, fabrication and control of a planar , non redondant, MEMS digital microrobot
type: Distribution
format: HTML
issued: 2026-05-07T22:37:33.080058
modified: 2026-05-07T22:37:33.052472
access URL: https://theses.hal.science/tel-00914595

test_moissonnage_selune
type: Agent