@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00914595v1> a dcat:Dataset ;
    dct:description """
              With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics,optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly ofsmaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over theworld, making use of high resolution actuators and numerous sensors adapted to the microworld.This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling,fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot— inspired from digital electronics — which makes use of binary actuators for the generation of discretedisplacements with high accuracy without any sensors (open-loop control). These highly repeatable and robustbinary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithicallyconbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable andmechanically robust. They are evenly spread inside a 10.5 μm length square.After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-roomof FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolutionwith 90 nm repeatability
            """ ;
    dct:identifier "NNT: 2013BESA2003" ;
    dct:issued "2026-05-07T22:37:33.070439"^^xsd:dateTime ;
    dct:language "fr" ;
    dct:modified "2026-05-07T22:37:33.070446"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Design, fabrication and control of a planar , non redondant, MEMS digital microrobot" ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00914595v1/resource/94080439-7c92-4cdc-991b-6060121d7035> ;
    dcat:keyword "bistable-structure",
        "boucle-ouverte",
        "digital",
        "flexible-structure",
        "infoeu-reposemanticsdoctoralthesis",
        "microfabrication",
        "microrobot",
        "numerique",
        "open-loop-control",
        "spiotherengineering-sciences-physicsother",
        "structure-bistable",
        "structure-flexible",
        "theses" ;
    dcat:landingPage <https://theses.hal.science/tel-00914595> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00914595v1/resource/94080439-7c92-4cdc-991b-6060121d7035> a dcat:Distribution ;
    dct:format "HTML" ;
    dct:issued "2026-05-07T22:37:33.080058"^^xsd:dateTime ;
    dct:modified "2026-05-07T22:37:33.052472"^^xsd:dateTime ;
    dct:title "Design, fabrication and control of a planar , non redondant, MEMS digital microrobot" ;
    dcat:accessURL <https://theses.hal.science/tel-00914595> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
    foaf:name "test_moissonnage_selune" .

<https://theses.hal.science/tel-00914595> a foaf:Document .