@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00913321v1> a dcat:Dataset ;
    dct:description """
              With the current expansion of micro- and nano-technologies (in such domains as watchmaking, electronics, optics, biomedical, . . .), came the necessity to build systems able to manipulate and make the assembly of smaller and smaller objects. Design of robotic stations, able to manipulate micro-objects, expanded all over the world, making use of high resolution actuators and numerous sensors adapted to the microworld. This thesis opens a new paradigm in the design of micromanipulation robotics. We present the design, modeling, fabrication and control of a new microrobot, the DiMiBot (Digital MicroroBot). It is the first digital microrobot -- inspired from digital electronics -- which makes use of binary actuators for the generation of discrete displacements with high accuracy without any sensors (open-loop control). These highly repeatable and robust binary actuators (bistable modules) generate an accurate displacement of 25 μm. They are monolithically conbined with a parallel flexible architecture, allowing the generation of a discrete workspace, in which all the 2N (N is the number of bistable modules used) distinct reachable positions are perfectly stable, repeatable and mechanically robust. They are evenly spread inside a 10.5 μm length square. After dimensioning, the first digital microrobot prototype in silicon was microfabricated in MIMENTO clean-room of FEMTO-ST institute. This DiMiBot has 4 bistable modules and generates a workspace of 3.5 μm resolution with 90 nm repeatability.
            """ ;
    dct:identifier "tel-00913321" ;
    dct:issued "2026-05-07T23:37:46.309377"^^xsd:dateTime ;
    dct:language "fr" ;
    dct:modified "2026-05-07T23:37:46.309381"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Design, fabrication and control of a planar, non-redondant, MEMS digital microrobot." ;
    dcat:contactPoint [ a vcard:Organization ;
            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00913321v1/resource/bdeb7055-16ac-4324-86e4-63f37507fe08> ;
    dcat:keyword "boucle-ouverte",
        "bsitable-structure",
        "digital",
        "flexible-structure",
        "infoeu-reposemanticsdoctoralthesis",
        "microfabrication",
        "microrobot",
        "numerique",
        "open-loop-control",
        "spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics",
        "structure-bistable",
        "structure-flexible",
        "theses" ;
    dcat:landingPage <https://theses.hal.science/tel-00913321> .

<https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00913321v1/resource/bdeb7055-16ac-4324-86e4-63f37507fe08> a dcat:Distribution ;
    dct:format "HTML" ;
    dct:issued "2026-05-07T23:37:46.311279"^^xsd:dateTime ;
    dct:modified "2026-05-07T23:37:46.293203"^^xsd:dateTime ;
    dct:title "Design, fabrication and control of a planar, non-redondant, MEMS digital microrobot." ;
    dcat:accessURL <https://theses.hal.science/tel-00913321> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
    foaf:name "test_moissonnage_selune" .

<https://theses.hal.science/tel-00913321> a foaf:Document .