Development of a machining processby EDM
type: Dataset
description: Electro Discharge Machining (EDM) is a non-contact technique allowing machining of electricallyconductive materials; it is well adapted for the machining of hard materials. The principle is based onthe creation of eroding electrical discharges between a tool and a piece, both immersed in adielectric. In this thesis, we have the studied miniaturization of the process, called micro electrodischarge machining (μ-EDM), which is considered as a complementary technique of mechanical orlaser micro-machining techniques and silicon micro technology processes (RIE, DRIE, LIGA)..However, the resolution of μEDM is limited.In this work, we have firstly developed an original method for making tungsten micro-tools withcylindrical profile by electrochemical etching. This method allows the reproducible fabrication ofmicro-tool with 15-μm diameter. Thinner micro-tools were also obtained (down to 700 nm) withreproducibility problems. Furthermore, a prototype machine for milling μ-EDM was developed with afully characterized electronics. Micro channels were obtained respectively in stainless steel with awidth of 40μm and in titanium with a width of 25μm; a surface roughness Ra of 86 nm was achievedin 600 x 600 x 30 μm cavities. Besides, the limitations of the apparatus were highlighted. In the lastpart of this work, we have studied the micro-discharge and the micro-plasma between the micro-tooland the part with electrical characterization. The resistivity and the inductance of the sparks weremeasured and integrated in a numerical model in order to explain the duration of the microdischarges and their intensity. Solutions for improving the machining resolution are also discussed atthe end of this work.
landing page: https://theses.hal.science/tel-00873543
identifier: NNT: 2012LYO10315
keyword: decharge-electrique
keyword: electro-discharge-machining
keyword: electrochemical-etching
keyword: electroerosion
keyword: fraisage-par-micro-electroerosion
keyword: gravure-electrochimique
keyword: infoeu-reposemanticsdoctoralthesis
keyword: machining-milling--edm
keyword: micro-electro-discharge
keyword: micro-electrode
keyword: micro-electroerosion
keyword: micro-outil
keyword: micro-plasma
keyword: micro-tool
keyword: micro-usinage
keyword: micromachining
keyword: spark
keyword: spiotherengineering-sciences-physicsother
keyword: theses
issued: 2026-05-09T08:45:14.806238
modified: 2026-05-09T08:45:14.806243
language: fr
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Development of a machining processby EDM
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00873543
issued: 2026-05-09T08:45:14.839646
modified: 2026-05-09T08:45:14.789748