The work presented in this PhD thesis is a contribution for the study of reconfigurable antennas based on MEMS integration for 3D heterogeneous millimeter communication systems. This study falls within the framework of a ANR project named SIPCOM, for heterogeneous integration of smart millimeter communicating systems. During this manuscript, we propose the implementation of membrane antennas with three technological processes. Firstly, a new simple and low cost technology based on FR4 and Pyralux substrates and a new concept of patch antenna fed by integrated waveguide are investigated. In a second time, this new antenna design has been matched in order to be integrated in the SIP module using Silicon/BCB technology. The third technology based on quartz substrates is used to demonstrate the feasibility of an electronic beamscanning antenna for which one each slot feeder is integrated into the design of the MEMS phase shifter to overcome the bonding interconnections between the phase shifter and the antenna.
Design and implementation of reconfigurable antennas based on MEMS integration for 3D heterogeneous millimeter communication systems