High Frequency MEMS Sensor for Aero-acoustic Measurements
type: Dataset
description: ISBN : 978-2-11-129173-7
landing page: https://theses.hal.science/tel-00838736
keyword: aero-acoustic
keyword: bulk-micro-machining
keyword: drie
keyword: infoeu-reposemanticsdoctoralthesis
keyword: mems
keyword: microphone
keyword: milc
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: theses
keyword: wide-band
issued: 2026-05-10T13:35:29.658986
modified: 2026-05-10T13:35:29.658991
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

High Frequency MEMS Sensor for Aero-acoustic Measurements
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00838736
issued: 2026-05-10T13:35:29.662156
modified: 2026-05-10T13:35:29.647612