test_moissonnage_selune
type: Agent

High Frequency MEMS Sensor for Aero-acoustic Measurements
type: Distribution
access URL: https://theses.hal.science/tel-00838736
format: HTML
issued: 2026-05-10T13:35:29.662156
modified: 2026-05-10T13:35:29.647612

High Frequency MEMS Sensor for Aero-acoustic Measurements
type: Dataset
contact point: Organization
  fn: CCSD
keyword: drie
keyword: milc
keyword: theses
keyword: infoeu-reposemanticsdoctoralthesis
keyword: wide-band
keyword: microphone
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: mems
keyword: aero-acoustic
keyword: bulk-micro-machining
landing page: https://theses.hal.science/tel-00838736
description: ISBN : 978-2-11-129173-7
issued: 2026-05-10T13:35:29.658986
language: en
modified: 2026-05-10T13:35:29.658991