Interferometric and Ellipsometric Sensors :...
URL: https://theses.hal.science/tel-00830892
Dataset description:
The first part of this manuscript (Chapters 1 to 3) includes all of my work on the dimensional metrology at the nanoscale. After giving an overview of the interferometric...
There are no views created for this resource yet.
Additional Information
| Field | Value |
|---|---|
| Data last updated | unknown |
| Metadata last updated | May 10, 2026 |
| Created | unknown |
| Format | HTML |
| License | https://about.hal.science/hal-authorisation-v1/, info:eu-repo/semantics/OpenAccess |
| Created | 2 months ago |
| Id | a48a5c99-2eb3-44b7-94de-5bba4bc7731b |
| Package id | oai-hal-tel-00830892v1 |
| Resource type | HTML |
| State | active |