Thermal characterization of matter using the 3ω method
This PhD thesis is devoted to the development of a measurement bench for thermal characterization. Nowadays, sensing techniques and instruments dedicated to this propose are numerous and evolve constantly : they still are an important research area. However, each instrument deals preferentially with one state of matter and measure mostly a unique thermal parameter. This measurement bench uses the so-called 3w technique, which consists in the measurement the thermal frequency response of a medium subject to an harmonic thermal heat fl ux. It is based on the thermoresistive e ffect that links the thermal domain to the electrical domain. It therefore gives an easy way to measure the thermal variations in function of the frequency and allows the determination of the thermal properties. Initially introduced for solids, we show that this tool can indeed measure the thermal conductivity but also gives access to thermal capacity. Moreover, we expand its eld of applications to other states of matter : liquids and gases. The sensor is fabricated using the microelectronics techniques and uses the silicon technology. That allows to reduce its dimensions and o ers interesting prospects in terms of miniaturization and integration.