Novel pseudo-MOSFET methods for the characterization of advanced SOI substrates
type: Dataset
contact point: Organization
  fn: CCSD
keyword: gold-nanoparticles
keyword: low-frequency-noise
keyword: mosfet-pseudo-mosfet
keyword: basse-temperature
keyword: theses
keyword: nanoparticules-dor
keyword: spiotherengineering-sciences-physicsother
keyword: silicon-on-insulator
keyword: infoeu-reposemanticsdoctoralthesis
keyword: smart-cuttm
keyword: bruit-basse-frequence
keyword: silicium-sur-isolant
keyword: low-temperature
keyword: split-c-v
keyword: soi-fortement-dope
keyword: sige-nws
keyword: heavily-doped-soi
keyword: nanofils-sige
landing page: https://theses.hal.science/tel-00796613
description: Silicon-On-Insulator (SOI) device architectures represent attractive alternatives to bulk ones thanks to the improvement of transistors and circuits performances. In this context, the SOI starting material should be of prime quality.In this thesis, we develop novel electrical characterization tools and models for advanced SOI substrates. The classical pseudo-MOSFET (-MOSFET) characterization for SOI was revisited and extended to low temperatures. Enriched variants of -MOSFET, proposed and demonstrated on numerous geometries, concern split C-V and low-frequency noise measurements. Based on split C-V, an extraction method for the effective mobility was validated. A model explaining the capacitance variations with the frequency shows good agreement with the experimental results. The -MOSFET was also extended to highly doped SOI films and a model for parameter extraction was derived. Furthermore, we proved the possibility to characterize SiGe nanowire 3D stacks using the -MOSFET concept. Finally thin film -MOSFET proved to be an interesting, technology-light detector for gold nanoparticles.
identifier: NNT: 2012GRENT060
issued: 2026-05-13T17:23:30.036699
language: fr
modified: 2026-05-13T17:23:30.036708

Novel pseudo-MOSFET methods for the characterization of advanced SOI substrates
type: Distribution
access URL: https://theses.hal.science/tel-00796613
format: HTML
issued: 2026-05-13T17:23:30.074571
modified: 2026-05-13T17:23:29.979863

test_moissonnage_selune
type: Agent