@prefix dcat: <http://www.w3.org/ns/dcat#> .
@prefix dct: <http://purl.org/dc/terms/> .
@prefix foaf: <http://xmlns.com/foaf/0.1/> .
@prefix vcard: <http://www.w3.org/2006/vcard/ns#> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

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    dct:description """
              The following works are base on the study of self assembly structures at the nanometric scale. At this scale the surface energy have a major impact in this organization. For a better understanding of this mechanism we studied different Silicon-Germanium base structures. We experimentally studied the crystalline or amorphous growth on different types of substrates (amorphous: SiO2, crystalline: Si or SOI). Some of these substrates were nano-structured using a focused ion beam using gallium source or gold-silicon source. In addition, we were able to use different surfaces such as TiO2 or porous silicon to study the organization of the material small size pore(less than 50nm).
            """ ;
    dct:identifier "tel-00796428" ;
    dct:issued "2026-05-13T18:04:22.390627"^^xsd:dateTime ;
    dct:language "fr" ;
    dct:modified "2026-05-13T18:04:22.390633"^^xsd:dateTime ;
    dct:publisher <https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> ;
    dct:title "Nanostrucuration and self-assembly of nano-objects for microelectronics application assited by FIB" ;
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            vcard:fn "CCSD" ] ;
    dcat:distribution <https://rec.harvest-normandie.data4citizen.com/dataset/oai-hal-tel-00796428v1/resource/65a61fa8-0fc6-4056-8ca1-581243a5f26f> ;
    dcat:keyword "auto-assemblage",
        "fib",
        "germanium",
        "infoeu-reposemanticsdoctoralthesis",
        "mbe",
        "self-assembly",
        "silicon",
        "silicum",
        "soi",
        "spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics",
        "tem",
        "theses" ;
    dcat:landingPage <https://theses.hal.science/tel-00796428> .

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    dct:issued "2026-05-13T18:04:22.423996"^^xsd:dateTime ;
    dct:modified "2026-05-13T18:04:22.353501"^^xsd:dateTime ;
    dct:title "Nanostrucuration and self-assembly of nano-objects for microelectronics application assited by FIB" ;
    dcat:accessURL <https://theses.hal.science/tel-00796428> .

<https://rec.harvest-normandie.data4citizen.com/organization/cce9db95-46d9-4dc2-84b6-764215d0a002> a foaf:Agent ;
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<https://theses.hal.science/tel-00796428> a foaf:Document .