Study of a piezoelectric bulk acoustic wave...
URL: https://theses.hal.science/tel-00789852
Dataset description:
The studied resonator is part of an industrial project carried by NXP Semiconductors. The objective is the realization of a integrable RF MEMS resonator in order to replace...
Source: Study of a piezoelectric bulk acoustic wave resonator in thin film technology
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Additional Information
| Field | Value |
|---|---|
| Data last updated | unknown |
| Metadata last updated | May 13, 2026 |
| Created | unknown |
| Format | HTML |
| License | https://about.hal.science/hal-authorisation-v1/, info:eu-repo/semantics/OpenAccess |
| Created | 5 months ago |
| Id | 652b682a-5335-495f-94ae-eb25766abfa2 |
| Package id | oai-hal-tel-00789852v2 |
| Resource type | HTML |
| State | active |