Piezoelectric materials utilisation for hybrid and monolithic integration of transformers
type: Dataset
description: Works presented in this report concerns the problems of electric devices integration in general and passive components integration in particular aiming to carry out the realization of integrated conversion systems. In a first part, the study and the characterization of piezoelectric transformers exhibiting millimetre-length is tackled for supply of fractions of Watts to few Watts applications. This transformer is well adopted to MOSFET & IGBT gate drive circuits integrated on a PCB substrate. This application is fully detailed in the report. In a second part, we have been interested in the problem of integration of piezoelectric micro-transformers in a silicon substrate for supplying micro-systems. We have been proposed new micro-transformer structure realized with AlN and PZT thin layers deposed by sputtering. These manufacturing process are compatible with silicon technologies and with the constraints of micro-machining. An original prototype has been realized and characterized.
landing page: https://theses.hal.science/tel-00789774
keyword: infoeu-reposemanticsdoctoralthesis
keyword: integration-hybride-et-monolithique
keyword: mems
keyword: micro-structure
keyword: micro-structures
keyword: micro-technologie
keyword: micro-technologies
keyword: monolithic-and-hybrid-integration
keyword: piezoelectric-devices
keyword: piezoelectric-transformer
keyword: spinrjengineering-sciences-physicselectric-power
keyword: theses
keyword: transformateur-piezoelectrique
issued: 2026-05-14T10:05:07.357049
modified: 2026-05-14T10:05:07.357065
language: fr
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Piezoelectric materials utilisation for hybrid and monolithic integration of transformers
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00789774
issued: 2026-05-14T10:05:07.363635
modified: 2026-05-14T10:05:07.314630