Correlation between manufacturing processes, microstructural properties and mechanical properties of metallic thin films for MEMS applications
type: Dataset
description: The European Space Agency and CNES are studying the possibility of sending microsystems in space, especially for the mass gain they represent. To improve the reliability of components, it is necessary to know their mechanical properties. Several characterization techniques exist, especially nanoindentation of thin films on substrates. However, results can be largely influenced by the substrate in the case of micron layers. The methods of uniaxial tension (CNES) and bulge-test (INL) on freestanding specimen are used to eliminate the effects of the substrate, but the fabrication of such structures is complex and requires many technological steps to remove the substrate on the backside. The objective of this thesis is to understand the relationship between manufacturing parameters of thin metal films of gold and aluminum thin films, their microstructure and mechanical properties using the tools described above. The first chapter presents different deposition techniques, their thermodynamics and kinetics, types of microstructures reported in the literature, and the fabrication of test structures. The second presents the microstructural characterization, and correlation between deposition parameters and the microstructural properties is discussed. Chapter three presents the mechanical characterization of thin films on substrate or freestanding ones, by the methods of nanoindentation with Berkovich and spherical tips, microtensile test and bulge test. The last chapter is devoted to relations between microstructural and mechanical properties of thin metal films and the influence of heat treatments.
landing page: https://theses.hal.science/tel-00770667
identifier: NNT: 2012ISAL0033
keyword: aluminium
keyword: aluminum
keyword: conception-de-microsystemes
keyword: couche-mince
keyword: film-mince-metallique
keyword: gold
keyword: infoeu-reposemanticsdoctoralthesis
keyword: micro-system-design
keyword: microelectronics
keyword: microelectronique
keyword: microstructure
keyword: microsysteme
keyword: nanoindentation
keyword: or
keyword: spiotherengineering-sciences-physicsother
keyword: theses
keyword: thin-layer
issued: 2026-05-15T13:13:19.010993
modified: 2026-05-15T13:13:19.010999
language: fr
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Correlation between manufacturing processes, microstructural properties and mechanical properties of metallic thin films for MEMS applications
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00770667
issued: 2026-05-15T13:13:19.018535
modified: 2026-05-15T13:13:18.964552