Lab-on-chips are one of the explored ways to answer the growing need of fast, portable, miniaturized and automated analysis systems. Detection based on the use of EOSFET (Electrolyte-Oxide-Semiconductor Field Effect Transistor) is one of the most promising, allowing the detection of very small amounts of biological species especially when downscaling these devices. This work concerns the study of such devices whose channel is a 1D-nanostructure. First, the conception and fabrication of the devices is exposed. Their characterisations are done thanks to a dedicated sensing set up. The sensibility of EOSFET to light, electrostatic charges, salinity and flow rate of the solution is put in evidence. The detection of a change of 0.7 μL.min-1 of flow rate is demonstrated. Two ways of functionnalisation of EOSFET are developed, the first one allowing the detection of a change of pH, the second one the detection of the presence of DNA targets. Different trials of detection showed several key parameters to control (like the stability of the device and of its environment) to realise electrical detection on EOSFET.
Détection directe d'événements chimiques et biologiques en milieu liquide sur nanostructures de silicium