Microcapteurs chimiques à base de micropoutres en silicium modifiées à l'aide dematériaux inorganiques microporeux
type: Dataset
description: In order to optimize the use of microcantilever in the way of chemical sensing, microporous sensitive coatings have been tried to detect ethanol, toluene and humidity. The use of microcantilever without sensitive coating have been performed and simple models has been made and permit to predict the response of microcantilever in different environments. These studies rely on the use of microcantilever within two different detection mode : the detection of mass variation of the sensor because of the sorption of species in sensitive coating ; and the detection of the change of physical properties of the fluid.
landing page: https://theses.hal.science/tel-00684171
keyword: capteurs-chimiques
keyword: detection
keyword: facteur-de-qualite
keyword: frequence-de-resonance
keyword: infoeu-reposemanticsdoctoralthesis
keyword: micropoutres
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
keyword: theses
keyword: zeolithes
issued: 2026-05-23T00:40:25.913830
modified: 2026-05-23T00:40:25.913837
language: fr
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

Microcapteurs chimiques à base de micropoutres en silicium modifiées à l'aide dematériaux inorganiques microporeux
type: Distribution
format: HTML
access URL: https://theses.hal.science/tel-00684171
issued: 2026-05-23T00:40:25.932693
modified: 2026-05-23T00:40:25.884007