Microcapteurs chimiques à base de micropoutres en silicium modifiées à l'aide dematériaux inorganiques microporeux
In order to optimize the use of microcantilever in the way of chemical sensing, microporous sensitive coatings have been tried to detect ethanol, toluene and humidity. The use of microcantilever without sensitive coating have been performed and simple models has been made and permit to predict the response of microcantilever in different environments. These studies rely on the use of microcantilever within two different detection mode : the detection of mass variation of the sensor because of the sorption of species in sensitive coating ; and the detection of the change of physical properties of the fluid.