PiezoMEMS for energy harvesting applications
type: Dataset
issued: 2026-05-05T15:47:48.325931
language: en
modified: 2026-05-05T15:47:48.325935
contact point: Organization
  fn: CCSD
keyword: conference-papers
keyword: infoeu-reposemanticsconferenceobject
keyword: mems
keyword: pacs-8542
keyword: spinanoengineering-sciences-physicsmicro-and-nanotechnologiesmicroelectronics
landing page: PiezoNEMS Workshop, PHELMA-Polygone

PiezoMEMS for energy harvesting applications
type: Distribution
format: HTML
issued: 2026-05-05T15:47:48.329224
modified: 2026-05-05T15:47:48.320171
access URL: https://hal.science/hal-00975956

test_moissonnage_selune
type: Agent