In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition
type: Dataset
description: International audience
landing page: 0169-4332
keyword: infoeu-reposemanticsarticle
keyword: journal-articles
keyword: optical-properties
keyword: physcondcm-msphysics-physicscondensed-matter-cond-matmaterials-science-cond-matmtrl-sci
keyword: plasma-enhanced-chemical-vapour-deposition
keyword: spectroscopic-ellipsometry
keyword: titanium-dioxide
issued: 2026-05-05T16:10:43.740007
modified: 2026-05-05T16:10:43.740011
language: en
contact point: Organization
  fn: CCSD

test_moissonnage_selune
type: Agent

In situ spectroscopic ellipsometry study of TiO2 films deposited by plasma enhanced chemical vapour deposition
type: Distribution
format: HTML
access URL: https://hal.science/hal-00974975
issued: 2026-05-05T16:10:43.741189
modified: 2026-05-05T16:10:43.732093